Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets
Research output: Contribution to conference › Poster › Research › peer-review
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Details
| Translated title of the contribution | Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets |
|---|---|
| Original language | English |
| Publication status | Published - 2013 |
| Event | 18th Plansee Seminar - Reutte, Austria Duration: 3 Jun 2013 → 7 Jun 2013 |
Conference
| Conference | 18th Plansee Seminar |
|---|---|
| Country/Territory | Austria |
| City | Reutte |
| Period | 3/06/13 → 7/06/13 |
