Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets

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Translated title of the contribution	Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets
Original language	English
Pages (from-to)	303-310
Journal	Surface & coatings technology
Volume	232
DOIs	https://doi.org/10.1016/j.surfcoat.2013.05.022
Publication status	Published - 2013