Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets
Research output: Contribution to journal › Article › Research › peer-review
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Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets. / Weirather, Thomas; Czettl, Christoph; Polcik, P. et al.
In: Surface & coatings technology, Vol. 232, 2013, p. 303-310.
In: Surface & coatings technology, Vol. 232, 2013, p. 303-310.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Weirather, T, Czettl, C, Polcik, P, Kathrein, M & Mitterer, C 2013, 'Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets', Surface & coatings technology, vol. 232, pp. 303-310. https://doi.org/10.1016/j.surfcoat.2013.05.022
APA
Vancouver
Weirather T, Czettl C, Polcik P, Kathrein M, Mitterer C. Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets. Surface & coatings technology. 2013;232:303-310. doi: 10.1016/j.surfcoat.2013.05.022
Author
Bibtex - Download
@article{2235f054ae2648389c7fc20ee2262802,
title = "Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets",
author = "Thomas Weirather and Christoph Czettl and P. Polcik and M. Kathrein and Christian Mitterer",
year = "2013",
doi = "10.1016/j.surfcoat.2013.05.022",
language = "English",
volume = "232",
pages = "303--310",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets
AU - Weirather, Thomas
AU - Czettl, Christoph
AU - Polcik, P.
AU - Kathrein, M.
AU - Mitterer, Christian
PY - 2013
Y1 - 2013
U2 - 10.1016/j.surfcoat.2013.05.022
DO - 10.1016/j.surfcoat.2013.05.022
M3 - Article
VL - 232
SP - 303
EP - 310
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
