Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
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| Translated title of the contribution | Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism |
|---|---|
| Original language | English |
| Pages (from-to) | 507-512 |
| Journal | Beilstein journal of nanotechnology |
| Volume | 3 |
| DOIs | |
| Publication status | Published - 2012 |
