High-temperature residual stresses in thin films characterized by x-ray diffraction substrate curvature method
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In: Review of scientific instruments, Vol. 78, 2007, p. 036103-01-036103-03.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - High-temperature residual stresses in thin films characterized by x-ray diffraction substrate curvature method
AU - Keckes, Jozef
AU - Eiper, E.
AU - Martinschitz, K.J.
AU - Köstenbauer, Harald
AU - Daniel, Rostislav
AU - Mitterer, Christian
PY - 2007
Y1 - 2007
U2 - 10.1063/1.2535857
DO - 10.1063/1.2535857
M3 - Article
VL - 78
SP - 036103-01-036103-03
JO - Review of scientific instruments
JF - Review of scientific instruments
SN - 0034-6748
ER -