High resolution determination of local residual stress gradients in single- and multilayer thin film systems
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Materials Center Leoben Forschungs GmbH
- Eidgenössische Materialprüfanstalt, EMPA
Details
Original language | English |
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Pages (from-to) | 616-623 |
Journal | Acta materialia |
Volume | 103 |
DOIs | |
Publication status | Published - 2016 |