Entwicklung und Simulation einer "Run to Run" Regelungsschleife für Ofenprozesse in der Halbleiterindustrie
Research output: Thesis › Master's Thesis (University Course) › peer-review
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| Translated title of the contribution | Development and simulation of a run to run controller for semiconductor furnace processes |
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| Original language | German |
| Qualification | Dipl.-Ing. |
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| Publication status | Published - 25 Nov 2004 |
