Enhancement of copper nanoparticle yield in magnetron sputter inert gas condensation by applying substrate bias voltage and its influence on thin film morphology

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Enhancement of copper nanoparticle yield in magnetron sputter inert gas condensation by applying substrate bias voltage and its influence on thin film morphology. / Knabl, Florian; Gutnik, Dominik; Patil, Prathamesh et al.
In: Vacuum, Vol. 230, 113724, 12.2024.

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@article{0aad72cbc20348a2b285479a726b433f,
title = "Enhancement of copper nanoparticle yield in magnetron sputter inert gas condensation by applying substrate bias voltage and its influence on thin film morphology",
keywords = "Low energy ion scattering spectroscopy, Magnetron sputter inert gas condensation, Magnetron sputtering, Nanoparticle synthesis, Thin film",
author = "Florian Knabl and Dominik Gutnik and Prathamesh Patil and Christine Bandl and Tijmen Vermeij and Pichler, {Christian M.} and Barbara Putz and Christian Mitterer",
note = "Publisher Copyright: {\textcopyright} 2024 The Authors",
year = "2024",
month = dec,
doi = "10.1016/j.vacuum.2024.113724",
language = "English",
volume = "230",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Enhancement of copper nanoparticle yield in magnetron sputter inert gas condensation by applying substrate bias voltage and its influence on thin film morphology

AU - Knabl, Florian

AU - Gutnik, Dominik

AU - Patil, Prathamesh

AU - Bandl, Christine

AU - Vermeij, Tijmen

AU - Pichler, Christian M.

AU - Putz, Barbara

AU - Mitterer, Christian

N1 - Publisher Copyright: © 2024 The Authors

PY - 2024/12

Y1 - 2024/12

KW - Low energy ion scattering spectroscopy

KW - Magnetron sputter inert gas condensation

KW - Magnetron sputtering

KW - Nanoparticle synthesis

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=85206340376&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2024.113724

DO - 10.1016/j.vacuum.2024.113724

M3 - Article

AN - SCOPUS:85206340376

VL - 230

JO - Vacuum

JF - Vacuum

SN - 0042-207X

M1 - 113724

ER -