Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Plansee Composite Materials GmbH
- Lawrence Berkeley National Laboratory
Details
| Original language | English |
|---|---|
| Pages (from-to) | 309-321 |
| Journal | Surface & coatings technology |
| Volume | 272 |
| DOIs | |
| Publication status | Published - 2015 |
