Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

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Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres. / Franz, Robert; Polcik, Peter; Anders, André.
In: Surface & coatings technology, Vol. 272, 2015, p. 309-321.

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@article{86bac0827ded445fb36a14f636c8d167,
title = "Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres",
author = "Robert Franz and Peter Polcik and Andr{\'e} Anders",
year = "2015",
doi = "10.1016/j.surfcoat.2015.03.047",
language = "English",
volume = "272",
pages = "309--321",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

AU - Franz, Robert

AU - Polcik, Peter

AU - Anders, André

PY - 2015

Y1 - 2015

U2 - 10.1016/j.surfcoat.2015.03.047

DO - 10.1016/j.surfcoat.2015.03.047

M3 - Article

VL - 272

SP - 309

EP - 321

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

ER -