Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films
Research output: Contribution to conference › Poster › Research › peer-review
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Details
| Original language | English |
|---|---|
| Publication status | Published - 2015 |
| Event | Campeon Innovation Week 2015 - München, Germany Duration: 12 Nov 2015 → 13 Nov 2015 |
Workshop
| Workshop | Campeon Innovation Week 2015 |
|---|---|
| Country/Territory | Germany |
| City | München |
| Period | 12/11/15 → 13/11/15 |
