Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films

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Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films. / Souli, Imane; Mitterer, Christian.
2015. Poster session presented at Campeon Innovation Week 2015, München, Germany.

Research output: Contribution to conferencePosterResearchpeer-review

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@conference{0756030812f04246af90a513087dfdd6,
title = "Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films",
author = "Imane Souli and Christian Mitterer",
year = "2015",
language = "English",
note = "Campeon Innovation Week 2015 ; Conference date: 12-11-2015 Through 13-11-2015",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films

AU - Souli, Imane

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

M3 - Poster

T2 - Campeon Innovation Week 2015

Y2 - 12 November 2015 through 13 November 2015

ER -