Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Research output: Contribution to journal › Article › Research › peer-review

Standard

Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications. / Gruber, Manuel; Leitner, Alexander; Kiener, Daniel et al.
In: Materials and Design, Vol. 213, 110306, 2022.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Gruber, M, Leitner, A, Kiener, D, Supancic, P & Bermejo, R 2022, 'Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications', Materials and Design, vol. 213, 110306. https://doi.org/10.1016/j.matdes.2021.110306, https://doi.org/10.1016/j.matdes.2021.110306

APA

Gruber, M., Leitner, A., Kiener, D., Supancic, P., & Bermejo, R. (2022). Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications. Materials and Design, 213, Article 110306. https://doi.org/10.1016/j.matdes.2021.110306, https://doi.org/10.1016/j.matdes.2021.110306

Vancouver

Gruber M, Leitner A, Kiener D, Supancic P, Bermejo R. Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications. Materials and Design. 2022;213:110306. doi: https://doi.org/10.1016/j.matdes.2021.110306, 10.1016/j.matdes.2021.110306

Author

Gruber, Manuel ; Leitner, Alexander ; Kiener, Daniel et al. / Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications. In: Materials and Design. 2022 ; Vol. 213.

Bibtex - Download

@article{cd021a152264436b92e4812f1d4f627c,
title = "Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications",
keywords = "Biaxial strength, Brittle single crystals, Hardness anisotropy, Reliability of microelectronic materials, Scratch testing, Strength anisotropy",
author = "Manuel Gruber and Alexander Leitner and Daniel Kiener and Peter Supancic and Raul Bermejo",
note = "Publisher Copyright: {\textcopyright} 2021 The Authors",
year = "2022",
doi = "https://doi.org/10.1016/j.matdes.2021.110306",
language = "English",
volume = "213",
journal = "Materials and Design",
issn = "0264-1275",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

AU - Gruber, Manuel

AU - Leitner, Alexander

AU - Kiener, Daniel

AU - Supancic, Peter

AU - Bermejo, Raul

N1 - Publisher Copyright: © 2021 The Authors

PY - 2022

Y1 - 2022

KW - Biaxial strength

KW - Brittle single crystals

KW - Hardness anisotropy

KW - Reliability of microelectronic materials

KW - Scratch testing

KW - Strength anisotropy

UR - http://www.scopus.com/inward/record.url?scp=85120697868&partnerID=8YFLogxK

U2 - https://doi.org/10.1016/j.matdes.2021.110306

DO - https://doi.org/10.1016/j.matdes.2021.110306

M3 - Article

AN - SCOPUS:85120697868

VL - 213

JO - Materials and Design

JF - Materials and Design

SN - 0264-1275

M1 - 110306

ER -

View graph of relations

Documents

SFX

Publication SFX