Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Research output: Contribution to journal › Article › Research › peer-review

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Original language	English
Article number	110306
Journal	Materials and Design
Volume	213
DOIs	https://doi.org/10.1016/j.matdes.2021.110306 https://doi.org/10.1016/j.matdes.2021.110306
Publication status	Published - 2022