Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications
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in: Materials and Design, Jahrgang 213, 110306, 2022.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications
AU - Gruber, Manuel
AU - Leitner, Alexander
AU - Kiener, Daniel
AU - Supancic, Peter
AU - Bermejo, Raul
N1 - Publisher Copyright: © 2021 The Authors
PY - 2022
Y1 - 2022
KW - Biaxial strength
KW - Brittle single crystals
KW - Hardness anisotropy
KW - Reliability of microelectronic materials
KW - Scratch testing
KW - Strength anisotropy
UR - http://www.scopus.com/inward/record.url?scp=85120697868&partnerID=8YFLogxK
U2 - https://doi.org/10.1016/j.matdes.2021.110306
DO - https://doi.org/10.1016/j.matdes.2021.110306
M3 - Article
AN - SCOPUS:85120697868
VL - 213
JO - Materials and Design
JF - Materials and Design
SN - 0264-1275
M1 - 110306
ER -
