Deposition of Ti–Al–N coatings by thermal CVD

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Authors

Translated title of the contribution	Deposition of Ti–Al–N coatings by thermal CVD
Original language	English
Pages (from-to)	563-568
Journal	International journal of refractory metals & hard materials
Volume	26
DOIs	https://doi.org/10.1016/j.ijrmhm.2008.01.003
Publication status	Published - 2008