Deposition of Ti–Al–N coatings by thermal CVD
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In: International journal of refractory metals & hard materials, Vol. 26, 2008, p. 563-568.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Deposition of Ti–Al–N coatings by thermal CVD
AU - Wagner, Josef
AU - Edlmayr, Viktoria
AU - Penoy, M.
AU - Michotte, C.
AU - Mitterer, Christian
AU - Kathrein, M.
PY - 2008
Y1 - 2008
U2 - 10.1016/j.ijrmhm.2008.01.003
DO - 10.1016/j.ijrmhm.2008.01.003
M3 - Article
VL - 26
SP - 563
EP - 568
JO - International journal of refractory metals & hard materials
JF - International journal of refractory metals & hard materials
SN - 0263-4368
ER -