Combinatorial refinement of thin-film microstructure, properties and process conditions: Iterative nanoscale search for self-assembled TiAlN nanolamellae
Research output: Contribution to journal › Article › Research › peer-review
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Original language | Undefined/Unknown |
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Pages (from-to) | 2217-2225 |
Number of pages | 9 |
Journal | Journal of applied crystallography |
Volume | 49 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2016 |