Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
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| Translated title of the contribution | Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering |
|---|---|
| Original language | English |
| Pages (from-to) | 19-25 |
| Journal | Vacuum |
| Volume | 89 |
| Publication status | Published - 2009 |
