Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

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Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. / Siffalovic, P.; Majkova, E.; Chitu, L. et al.
In: Vacuum, Vol. 89, 2009, p. 19-25.

Research output: Contribution to journalArticleResearchpeer-review

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Siffalovic, P, Majkova, E, Chitu, L, Jergel, M, Luby, S, Keckes, J, Maier, GA, Timmann, A, Roth, SV, Tsuru, T, Harada, T, Yamamoto, M & Heinzmann, U 2009, 'Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering', Vacuum, vol. 89, pp. 19-25.

APA

Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G. A., Timmann, A., Roth, S. V., Tsuru, T., Harada, T., Yamamoto, M., & Heinzmann, U. (2009). Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum, 89, 19-25.

Vancouver

Author

Siffalovic, P. ; Majkova, E. ; Chitu, L. et al. / Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. In: Vacuum. 2009 ; Vol. 89. pp. 19-25.

Bibtex - Download

@article{97785350f58b475c9e4694892d6080b2,
title = "Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering",
author = "P. Siffalovic and E. Majkova and L. Chitu and M. Jergel and S. Luby and Jozef Keckes and Maier, {G{\"u}nther Alois} and A. Timmann and S.V. Roth and T. Tsuru and T. Harada and M. Yamamoto and U. Heinzmann",
year = "2009",
language = "English",
volume = "89",
pages = "19--25",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

AU - Siffalovic, P.

AU - Majkova, E.

AU - Chitu, L.

AU - Jergel, M.

AU - Luby, S.

AU - Keckes, Jozef

AU - Maier, Günther Alois

AU - Timmann, A.

AU - Roth, S.V.

AU - Tsuru, T.

AU - Harada, T.

AU - Yamamoto, M.

AU - Heinzmann, U.

PY - 2009

Y1 - 2009

M3 - Article

VL - 89

SP - 19

EP - 25

JO - Vacuum

JF - Vacuum

SN - 0042-207X

ER -