Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
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In: Beilstein journal of nanotechnology , Vol. 7.2016, No. April, 28.04.2016, p. 637-644.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
AU - Ganser, Christian
AU - Popovski, Gerhard
AU - Morak, Roland
AU - Sharifi Rajabi, Parvin
AU - Marmiroli, Benedetta
AU - Sartori, Barbara
AU - Amenitsch, Heinz
AU - Grießer, Thomas
AU - Teichert, Karl Christian
AU - Paris, Oskar
PY - 2016/4/28
Y1 - 2016/4/28
N2 - We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.
AB - We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.
U2 - 10.3762/bjnano.7.56
DO - 10.3762/bjnano.7.56
M3 - Article
VL - 7.2016
SP - 637
EP - 644
JO - Beilstein journal of nanotechnology
JF - Beilstein journal of nanotechnology
SN - 2190-4286
IS - April
ER -