Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Max-Planck-Institut für Kohlenforschung
- Technische Universität Graz
Abstract
We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.
Details
Original language | English |
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Pages (from-to) | 637-644 |
Number of pages | 8 |
Journal | Beilstein journal of nanotechnology |
Volume | 7.2016 |
Issue number | April |
DOIs | |
Publication status | Published - 28 Apr 2016 |