Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

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Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers. / Ganser, Christian; Popovski, Gerhard; Morak, Roland et al.
in: Beilstein journal of nanotechnology , Jahrgang 7.2016, Nr. April, 28.04.2016, S. 637-644.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{e178203d32044ac28dd82d47605d0dbc,
title = "Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers",
abstract = "We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.",
author = "Christian Ganser and Gerhard Popovski and Roland Morak and {Sharifi Rajabi}, Parvin and Benedetta Marmiroli and Barbara Sartori and Heinz Amenitsch and Thomas Grie{\ss}er and Teichert, {Karl Christian} and Oskar Paris",
year = "2016",
month = apr,
day = "28",
doi = "10.3762/bjnano.7.56",
language = "English",
volume = "7.2016",
pages = "637--644",
journal = "Beilstein journal of nanotechnology ",
issn = "2190-4286",
publisher = "Beilstein-Institut Zur Forderung der Chemischen Wissenschaften",
number = "April",

}

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TY - JOUR

T1 - Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

AU - Ganser, Christian

AU - Popovski, Gerhard

AU - Morak, Roland

AU - Sharifi Rajabi, Parvin

AU - Marmiroli, Benedetta

AU - Sartori, Barbara

AU - Amenitsch, Heinz

AU - Grießer, Thomas

AU - Teichert, Karl Christian

AU - Paris, Oskar

PY - 2016/4/28

Y1 - 2016/4/28

N2 - We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.

AB - We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.

U2 - 10.3762/bjnano.7.56

DO - 10.3762/bjnano.7.56

M3 - Article

VL - 7.2016

SP - 637

EP - 644

JO - Beilstein journal of nanotechnology

JF - Beilstein journal of nanotechnology

SN - 2190-4286

IS - April

ER -