TY - JOUR

T1 - Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

AU - Ganser, Christian

AU - Popovski, Gerhard

AU - Morak, Roland

AU - Sharifi Rajabi, Parvin

AU - Marmiroli, Benedetta

AU - Sartori, Barbara

AU - Amenitsch, Heinz

AU - Grießer, Thomas

AU - Teichert, Karl Christian

AU - Paris, Oskar

PY - 2016/4/28

Y1 - 2016/4/28

N2 - We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.

AB - We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.

U2 - 10.3762/bjnano.7.56

DO - 10.3762/bjnano.7.56

M3 - Article

VL - 7.2016

SP - 637

EP - 644

JO - Beilstein journal of nanotechnology

JF - Beilstein journal of nanotechnology

SN - 2190-4286

IS - April

ER -