Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings
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Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings. / Dehm, Gerhard; Wörgötter, Hans-Peter; Cazottes, Sophie et al.
In: Thin solid films, Vol. 518, 2009, p. 1517-1521.
In: Thin solid films, Vol. 518, 2009, p. 1517-1521.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Dehm, G, Wörgötter, H-P, Cazottes, S, Purswani, JM, Gall, D, Mitterer, C & Kiener, D 2009, 'Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings', Thin solid films, vol. 518, pp. 1517-1521. https://doi.org/10.1016/j.tsf.2009.09.070
APA
Dehm, G., Wörgötter, H.-P., Cazottes, S., Purswani, J. M., Gall, D., Mitterer, C., & Kiener, D. (2009). Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings. Thin solid films, 518, 1517-1521. https://doi.org/10.1016/j.tsf.2009.09.070
Vancouver
Dehm G, Wörgötter HP, Cazottes S, Purswani JM, Gall D, Mitterer C et al. Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings. Thin solid films. 2009;518:1517-1521. doi: 10.1016/j.tsf.2009.09.070
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Bibtex - Download
@article{912c83a4ba3b4caba7218e443ab70825,
title = "Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings",
author = "Gerhard Dehm and Hans-Peter W{\"o}rg{\"o}tter and Sophie Cazottes and Purswani, {Jaya M.} and Daniel Gall and Christian Mitterer and Daniel Kiener",
year = "2009",
doi = "10.1016/j.tsf.2009.09.070",
language = "English",
volume = "518",
pages = "1517--1521",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings
AU - Dehm, Gerhard
AU - Wörgötter, Hans-Peter
AU - Cazottes, Sophie
AU - Purswani, Jaya M.
AU - Gall, Daniel
AU - Mitterer, Christian
AU - Kiener, Daniel
PY - 2009
Y1 - 2009
U2 - 10.1016/j.tsf.2009.09.070
DO - 10.1016/j.tsf.2009.09.070
M3 - Article
VL - 518
SP - 1517
EP - 1521
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
