Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings

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Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings. / Dehm, Gerhard; Wörgötter, Hans-Peter; Cazottes, Sophie et al.
in: Thin solid films, Jahrgang 518, 2009, S. 1517-1521.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Dehm G, Wörgötter HP, Cazottes S, Purswani JM, Gall D, Mitterer C et al. Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings. Thin solid films. 2009;518:1517-1521. doi: 10.1016/j.tsf.2009.09.070

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Bibtex - Download

@article{912c83a4ba3b4caba7218e443ab70825,
title = "Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings",
author = "Gerhard Dehm and Hans-Peter W{\"o}rg{\"o}tter and Sophie Cazottes and Purswani, {Jaya M.} and Daniel Gall and Christian Mitterer and Daniel Kiener",
year = "2009",
doi = "10.1016/j.tsf.2009.09.070",
language = "English",
volume = "518",
pages = "1517--1521",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings

AU - Dehm, Gerhard

AU - Wörgötter, Hans-Peter

AU - Cazottes, Sophie

AU - Purswani, Jaya M.

AU - Gall, Daniel

AU - Mitterer, Christian

AU - Kiener, Daniel

PY - 2009

Y1 - 2009

U2 - 10.1016/j.tsf.2009.09.070

DO - 10.1016/j.tsf.2009.09.070

M3 - Article

VL - 518

SP - 1517

EP - 1521

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -