Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings
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| Translated title of the contribution | Can micro-compression testing provide stress-strain data for thin films?: A comparative study using Cu, VN, TiN and W coatings |
|---|---|
| Original language | English |
| Pages (from-to) | 1517-1521 |
| Journal | Thin solid films |
| Volume | 518 |
| DOIs | |
| Publication status | Published - 2009 |
