Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers
Research output: Contribution to journal › Article › Research › peer-review
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Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers. / Kleinbichler, Andreas; Todt, Juraj; Zechner, Johannes et al.
In: Surface & coatings technology, Vol. 332.2017, No. 25 December, 18.09.2017, p. 376-381.
In: Surface & coatings technology, Vol. 332.2017, No. 25 December, 18.09.2017, p. 376-381.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Kleinbichler, A, Todt, J, Zechner, J, Wöhlert, S, Többens, D & Cordill, M 2017, 'Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers', Surface & coatings technology, vol. 332.2017, no. 25 December, pp. 376-381. https://doi.org/10.1016/j.surfcoat.2017.07.087
APA
Kleinbichler, A., Todt, J., Zechner, J., Wöhlert, S., Többens, D., & Cordill, M. (2017). Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers. Surface & coatings technology, 332.2017(25 December), 376-381. Advance online publication. https://doi.org/10.1016/j.surfcoat.2017.07.087
Vancouver
Kleinbichler A, Todt J, Zechner J, Wöhlert S, Többens D, Cordill M. Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers. Surface & coatings technology. 2017 Sept 18;332.2017(25 December):376-381. Epub 2017 Sept 18. doi: 10.1016/j.surfcoat.2017.07.087
Author
Bibtex - Download
@article{19cd291a875b4d4dadf20d8c757a181d,
title = "Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers",
author = "Andreas Kleinbichler and Juraj Todt and Johannes Zechner and Stefan W{\"o}hlert and Daniel T{\"o}bbens and Megan Cordill",
year = "2017",
month = sep,
day = "18",
doi = "10.1016/j.surfcoat.2017.07.087",
language = "English",
volume = "332.2017",
pages = "376--381",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "25 December",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers
AU - Kleinbichler, Andreas
AU - Todt, Juraj
AU - Zechner, Johannes
AU - Wöhlert, Stefan
AU - Többens, Daniel
AU - Cordill, Megan
PY - 2017/9/18
Y1 - 2017/9/18
U2 - 10.1016/j.surfcoat.2017.07.087
DO - 10.1016/j.surfcoat.2017.07.087
M3 - Article
VL - 332.2017
SP - 376
EP - 381
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
IS - 25 December
ER -
