Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH
- Erich Schmid Institute of Materials Science
- Helmholtz-Zentrum Berlin für Materialien und Energie (HZB)
- Infineon Technologies AG Austria
Details
Original language | English |
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Pages (from-to) | 376-381 |
Number of pages | 6 |
Journal | Surface & coatings technology |
Volume | 332.2017 |
Issue number | 25 December |
DOIs | |
Publication status | E-pub ahead of print - 18 Sept 2017 |