Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • Johannes Zechner
  • Stefan Wöhlert
  • Daniel Többens

Organisational units

External Organisational units

  • KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH
  • Erich Schmid Institute of Materials Science
  • Helmholtz-Zentrum Berlin für Materialien und Energie (HZB)
  • Infineon Technologies AG Austria

Details

Original languageEnglish
Pages (from-to)376-381
Number of pages6
JournalSurface & coatings technology
Volume332.2017
Issue number25 December
DOIs
Publication statusE-pub ahead of print - 18 Sept 2017