Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS

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Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS. / Vogel, U.; Gemming, Thomas; Eckert, Jürgen et al.
In: Surface and interface analysis, Vol. 48.2016, No. 7, 30.03.2016, p. 570-574.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Vogel, U, Gemming, T, Eckert, J & Oswald, S 2016, 'Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS', Surface and interface analysis, vol. 48.2016, no. 7, pp. 570-574. https://doi.org/10.1002/sia.6006

APA

Vogel, U., Gemming, T., Eckert, J., & Oswald, S. (2016). Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS. Surface and interface analysis, 48.2016(7), 570-574. Advance online publication. https://doi.org/10.1002/sia.6006

Vancouver

Vogel U, Gemming T, Eckert J, Oswald S. Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS. Surface and interface analysis. 2016 Mar 30;48.2016(7):570-574. Epub 2016 Mar 30. doi: 10.1002/sia.6006

Author

Vogel, U. ; Gemming, Thomas ; Eckert, Jürgen et al. / Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS. In: Surface and interface analysis. 2016 ; Vol. 48.2016, No. 7. pp. 570-574.

Bibtex - Download

@article{35f308194ea947fc9340dba51f9f0f3a,
title = "Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS",
keywords = "ARXPS, LiNbO, LiTaO, SAW, stability, tantalum deposition, titanium deposition",
author = "U. Vogel and Thomas Gemming and J{\"u}rgen Eckert and Stefan Oswald",
year = "2016",
month = mar,
day = "30",
doi = "10.1002/sia.6006",
language = "English",
volume = "48.2016",
pages = "570--574",
journal = "Surface and interface analysis",
issn = "0142-2421",
publisher = "John Wiley & Sons, Gro{\ss}britannien",
number = "7",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS

AU - Vogel, U.

AU - Gemming, Thomas

AU - Eckert, Jürgen

AU - Oswald, Stefan

PY - 2016/3/30

Y1 - 2016/3/30

KW - ARXPS

KW - LiNbO

KW - LiTaO

KW - SAW

KW - stability

KW - tantalum deposition

KW - titanium deposition

UR - http://www.scopus.com/inward/record.url?scp=84962756730&partnerID=8YFLogxK

U2 - 10.1002/sia.6006

DO - 10.1002/sia.6006

M3 - Article

AN - SCOPUS:84962756730

VL - 48.2016

SP - 570

EP - 574

JO - Surface and interface analysis

JF - Surface and interface analysis

SN - 0142-2421

IS - 7

ER -

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