Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- TU Dresden
- Leibniz Institute for Solid State and Materials Research, Dresden
Details
Original language | English |
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Pages (from-to) | 570-574 |
Number of pages | 5 |
Journal | Surface and interface analysis |
Volume | 48.2016 |
Issue number | 7 |
DOIs | |
Publication status | E-pub ahead of print - 30 Mar 2016 |