Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS

Research output: Contribution to journalArticleResearchpeer-review

Authors

Organisational units

External Organisational units

  • TU Dresden
  • Leibniz Institute for Solid State and Materials Research, Dresden

Details

Original languageEnglish
Pages (from-to)570-574
Number of pages5
JournalSurface and interface analysis
Volume48.2016
Issue number7
DOIs
Publication statusE-pub ahead of print - 30 Mar 2016