Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS. / Vogel, U.; Gemming, Thomas; Eckert, Jürgen et al.
in: Surface and interface analysis, Jahrgang 48.2016, Nr. 7, 30.03.2016, S. 570-574.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{35f308194ea947fc9340dba51f9f0f3a,
title = "Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS",
keywords = "ARXPS, LiNbO, LiTaO, SAW, stability, tantalum deposition, titanium deposition",
author = "U. Vogel and Thomas Gemming and J{\"u}rgen Eckert and Stefan Oswald",
year = "2016",
month = mar,
day = "30",
doi = "10.1002/sia.6006",
language = "English",
volume = "48.2016",
pages = "570--574",
journal = "Surface and interface analysis",
issn = "0142-2421",
publisher = "John Wiley & Sons, Gro{\ss}britannien",
number = "7",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Analysis of the thermal and temporal stability of Ta and Ti thin films onto SAW–substrate materials (LiNbO3 and LiTaO3) using AR-XPS

AU - Vogel, U.

AU - Gemming, Thomas

AU - Eckert, Jürgen

AU - Oswald, Stefan

PY - 2016/3/30

Y1 - 2016/3/30

KW - ARXPS

KW - LiNbO

KW - LiTaO

KW - SAW

KW - stability

KW - tantalum deposition

KW - titanium deposition

UR - http://www.scopus.com/inward/record.url?scp=84962756730&partnerID=8YFLogxK

U2 - 10.1002/sia.6006

DO - 10.1002/sia.6006

M3 - Article

AN - SCOPUS:84962756730

VL - 48.2016

SP - 570

EP - 574

JO - Surface and interface analysis

JF - Surface and interface analysis

SN - 0142-2421

IS - 7

ER -