Aluminium oxide for an effective gate in Si/SiGe two-dimensional electron gas systems

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Abstract

We investigate the gating properties of Si/SiGe two-dimensional electron gas systems with various gate materials and fabricate a lateral Si/SiGe quantum dot by gating through an Al2O3 film. In comparison to the conventional surface Schottky gates, gating through a thin Al2O3 layer provides a strong suppression of leakage current. The fabricated quantum dot shows a periodic current oscillation or Coulomb oscillation with negligible gate leakage, indicating that the gating employed may be good for implementing Si/SiGe-based spin qubit devices with quantum dots.

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Translated title of the contributionAluminium oxide for an effective gate in Si/SiGe two-dimensional electron gas systems
Original languageEnglish
Article number05504
JournalSemiconductor science and technology
Volume26.2011
Issue number5
DOIs
Publication statusPublished - 11 Mar 2011