Aluminium oxide for an effective gate in Si/SiGe two-dimensional electron gas systems
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Abstract
We investigate the gating properties of Si/SiGe two-dimensional electron gas systems with various gate materials and fabricate a lateral Si/SiGe quantum dot by gating through an Al2O3 film. In comparison to the conventional surface Schottky gates, gating through a thin Al2O3 layer provides a strong suppression of leakage current. The fabricated quantum dot shows a periodic current oscillation or Coulomb oscillation with negligible gate leakage, indicating that the gating employed may be good for implementing Si/SiGe-based spin qubit devices with quantum dots.
Details
Translated title of the contribution | Aluminium oxide for an effective gate in Si/SiGe two-dimensional electron gas systems |
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Original language | English |
Article number | 05504 |
Journal | Semiconductor science and technology |
Volume | 26.2011 |
Issue number | 5 |
DOIs | |
Publication status | Published - 11 Mar 2011 |