Aluminium oxide for an effective gate in Si/SiGe two-dimensional electron gas systems
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Abstract
We investigate the gating properties of Si/SiGe two-dimensional electron gas systems with various gate materials and fabricate a lateral Si/SiGe quantum dot by gating through an Al2O3 film. In comparison to the conventional surface Schottky gates, gating through a thin Al2O3 layer provides a strong suppression of leakage current. The fabricated quantum dot shows a periodic current oscillation or Coulomb oscillation with negligible gate leakage, indicating that the gating employed may be good for implementing Si/SiGe-based spin qubit devices with quantum dots.
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Titel in Übersetzung | Aluminium oxide for an effective gate in Si/SiGe two-dimensional electron gas systems |
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Originalsprache | Englisch |
Aufsatznummer | 05504 |
Fachzeitschrift | Semiconductor science and technology |
Jahrgang | 26.2011 |
Ausgabenummer | 5 |
DOIs | |
Status | Veröffentlicht - 11 März 2011 |