Latest Research Output

• Functional thin films for advanced microelectronics at the chair for functional materials and material systems

  Research output: Contribution to conference › Poster › Research › peer-review

• Revealing dynamic-mechanical properties of precipitates in a nanostructured thin film using micromechanical spectroscopy

  Research output: Contribution to journal › Article › Research › peer-review

• Realistic structural properties of amorphous SiNx from machine-learning-assisted molecular dynamics

  Research output: Contribution to conference › Poster › Research