Thermal stability of magnetron sputtered Zr–Si–N films

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Translated title of the contribution	Thermal stability of magnetron sputtered Zr–Si–N films
Original language	English
Pages (from-to)	3368-3376
Journal	Surface & coatings technology
Volume	201
DOIs	https://doi.org/10.1016/j.surfcoat.2006.07.206 https://doi.org/10.1016/j.surfcoat.2006.07.206
Publication status	Published - 2006