Marlene Mühlbacher

(Former)

Research output

  1. Published

    Diffusion Studies in the TiN/Cu Bilayer System and Beyond

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Greczynski, G., Lu, J., Schalk, N., Hultman, L. & Mitterer, C., 2016.

    Research output: Contribution to conferencePresentationResearchpeer-review

  2. Published

    Electrosorption of Hydrogen in Pd-Based Metallic Glass Nanofilms

    Sarac, B., Karazehir, T., Mühlbacher, M., Kaynak, B., Gammer, C., Schöberl, T., Sarac, A. S. & Eckert, J., 1 May 2018, In: ACS Applied Energy Materials. 1.2018, 6, p. 2630-2646 17 p.

    Research output: Contribution to journalArticleResearchpeer-review

  3. Published

    Enhanced Ti0.84Ta0.16N diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si (001) wafers and Cu overlayers

    Mühlbacher, M., Greczynski, G., Sartory, B., Schalk, N., Lu, J., Petrov, I., Greene, J. E., Hultman, L. & Mitterer, C., 2018, In: Scientific reports (London : Nature Publishing Group). p. 1-9

    Research output: Contribution to journalArticleResearchpeer-review

  4. Published

    Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L. & Mitterer, C., 2015.

    Research output: Contribution to conferencePresentationResearchpeer-review

  5. Published

    Functional thin films for display and microelectronics applications

    Mitterer, C., Jörg, T., Franz, R., Mühlbacher, M., Sartory, B., Mendez Martin, F. & Schalk, N., 2015, In: Berg- und hüttenmännische Monatshefte : BHM. 160, 5, p. 231-234

    Research output: Contribution to journalArticleResearchpeer-review

  6. Published

    Funktionale Schichten in der µ-Elektronik

    Mitterer, C., Franz, R., Jachs, C., Hofer, A. M., Jörg, T., Pachlhofer, J. & Mühlbacher, M., 2014.

    Research output: Contribution to conferencePosterResearchpeer-review

  7. Published
  8. Published

    Influence of Fe impurities on structure and properties of arc-evaporated AlCrN coatings

    Mühlbacher, M., Franz, R., Paulitsch, J., Rudigier, H., Polcik, P., Mayrhofer, P. H. & Mitterer, C., 2013, In: Surface & coatings technology. 215, p. 96-103

    Research output: Contribution to journalArticleResearchpeer-review

  9. Published

    Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

    Mühlbacher, M., Mendez Martin, F., Sartory, B., Lu, J., Schalk, N., Lars, H. & Mitterer, C., 2014.

    Research output: Contribution to conferencePresentationResearchpeer-review

  10. Published