Marlene Mühlbacher
(Former)
Research output
- Published
Diffusion Studies in the TiN/Cu Bilayer System and Beyond
Mühlbacher, M., Mendez Martin, F., Sartory, B., Greczynski, G., Lu, J., Schalk, N., Hultman, L. & Mitterer, C., 2016.Research output: Contribution to conference › Presentation › Research › peer-review
- Published
Electrosorption of Hydrogen in Pd-Based Metallic Glass Nanofilms
Sarac, B., Karazehir, T., Mühlbacher, M., Kaynak, B., Gammer, C., Schöberl, T., Sarac, A. S. & Eckert, J., 1 May 2018, In: ACS Applied Energy Materials. 1.2018, 6, p. 2630-2646 17 p.Research output: Contribution to journal › Article › Research › peer-review
- Published
Enhanced Ti0.84Ta0.16N diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si (001) wafers and Cu overlayers
Mühlbacher, M., Greczynski, G., Sartory, B., Schalk, N., Lu, J., Petrov, I., Greene, J. E., Hultman, L. & Mitterer, C., 2018, In: Scientific reports (London : Nature Publishing Group). p. 1-9Research output: Contribution to journal › Article › Research › peer-review
- Published
Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography
Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L. & Mitterer, C., 2015.Research output: Contribution to conference › Presentation › Research › peer-review
- Published
Functional thin films for display and microelectronics applications
Mitterer, C., Jörg, T., Franz, R., Mühlbacher, M., Sartory, B., Mendez Martin, F. & Schalk, N., 2015, In: Berg- und hüttenmännische Monatshefte : BHM. 160, 5, p. 231-234Research output: Contribution to journal › Article › Research › peer-review
- Published
Funktionale Schichten in der µ-Elektronik
Mitterer, C., Franz, R., Jachs, C., Hofer, A. M., Jörg, T., Pachlhofer, J. & Mühlbacher, M., 2014.Research output: Contribution to conference › Poster › Research › peer-review
- Published
Influence of Fe impurities on structure and properties of AlCrN films grown by cathodic arc evaporation
Mühlbacher, M., 2011, 34 p.Research output: Thesis › Diploma Thesis › peer-review
- Published
Influence of Fe impurities on structure and properties of arc-evaporated AlCrN coatings
Mühlbacher, M., Franz, R., Paulitsch, J., Rudigier, H., Polcik, P., Mayrhofer, P. H. & Mitterer, C., 2013, In: Surface & coatings technology. 215, p. 96-103Research output: Contribution to journal › Article › Research › peer-review
- Published
Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT
Mühlbacher, M., Mendez Martin, F., Sartory, B., Lu, J., Schalk, N., Lars, H. & Mitterer, C., 2014.Research output: Contribution to conference › Presentation › Research › peer-review
- Published
Interdiffusion within model TiN/Cu and TiTaN/Cu systems synthesized by combinatorial thin film deposition
Mühlbacher, M., 2015Research output: Thesis › Doctoral Thesis