Thin solid films, 0040-6090
Journal
| ISSNs | 0040-6090 |
|---|
81 - 82 out of 82Page size: 10
Research output
- 1994
- Published
Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy
Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G. & GRASSERBAUER, M., 1994, In: Thin solid films. p. 72-80Research output: Contribution to journal › Article › Research › peer-review
- Published
Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films
Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G. & GRASSERBAUER, M., 1994, In: Thin solid films. p. 155-162Research output: Contribution to journal › Article › Research › peer-review
