The sputter performance of an industrial-scale planar Mo-target over ist lifetime:target erosion and film properties
Activity: Talk or presentation › Oral presentation
Participants
- Martin Rausch - Speaker
- Asaf Sabag - contributor
- Karl-Heinz Pichler - contributor
- Georg Gruber - contributor
- Judith Köstenbauer - contributor
- Harald Köstenbauer - contributor
- Patrice Kreiml - contributor
- Megan J. Cordill - contributor
- Jörg Winkler - contributor
- Christian Mitterer - contributor
Date
1 May 2019
Martin Rausch - Speaker
Asaf Sabag - contributor
Karl-Heinz Pichler - contributor
Georg Gruber - contributor
Judith Köstenbauer - contributor
Harald Köstenbauer - contributor
Patrice Kreiml - contributor
Megan J. Cordill - contributor
Jörg Winkler - contributor
Christian Mitterer - contributor
1 May 2019
Event (Conference)
| Title | 62nd Annual SVC Technical Conference |
|---|---|
| Period | 27/04/18 → 2/05/19 |
| City | Long Beach |
| Country/Territory | United States |
