Thermo-mechanical behaviour of Mo-Ag thin films

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Thermo-mechanical behaviour of Mo-Ag thin films. / Trost, Claus Othmar Wolfgang.
2018.

Publikationen: Thesis / Studienabschlussarbeiten und HabilitationsschriftenMasterarbeit

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Trost COW. Thermo-mechanical behaviour of Mo-Ag thin films. 2018. doi: 10.34901/mul.pub.2023.271

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@mastersthesis{4e44954bbbb144cfb28f4ed4e36a48f7,
title = "Thermo-mechanical behaviour of Mo-Ag thin films",
abstract = "In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.",
keywords = "Mo, Ag, Molybd{\"a}n, Silber, d{\"u}nne Filme, flexibel, W{\"a}rmebehandlung, Metastabil, Wafer-Kr{\"u}mmungs-Methode, Synchrotron, Mo, Ag, Molybdenum, Silver, thin films, immiscible, sputtering, flexible, thermo-mechanical, wafer curvature, annealing, X-Ray diffraction, Synchrotron, metastable phases",
author = "Trost, {Claus Othmar Wolfgang}",
note = "embargoed until 18-09-2023",
year = "2018",
doi = "10.34901/mul.pub.2023.271",
language = "English",
school = "Montanuniversitaet Leoben (000)",

}

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TY - THES

T1 - Thermo-mechanical behaviour of Mo-Ag thin films

AU - Trost, Claus Othmar Wolfgang

N1 - embargoed until 18-09-2023

PY - 2018

Y1 - 2018

N2 - In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.

AB - In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.

KW - Mo

KW - Ag

KW - Molybdän

KW - Silber

KW - dünne Filme

KW - flexibel

KW - Wärmebehandlung

KW - Metastabil

KW - Wafer-Krümmungs-Methode

KW - Synchrotron

KW - Mo

KW - Ag

KW - Molybdenum

KW - Silver

KW - thin films

KW - immiscible

KW - sputtering

KW - flexible

KW - thermo-mechanical

KW - wafer curvature

KW - annealing

KW - X-Ray diffraction

KW - Synchrotron

KW - metastable phases

U2 - 10.34901/mul.pub.2023.271

DO - 10.34901/mul.pub.2023.271

M3 - Master's Thesis

ER -