TY - THES

T1 - Thermo-mechanical behaviour of Mo-Ag thin films

AU - Trost, Claus Othmar Wolfgang

N1 - embargoed until 18-09-2023

PY - 2018

Y1 - 2018

N2 - In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.

AB - In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.

KW - Mo

KW - Ag

KW - Molybdän

KW - Silber

KW - dünne Filme

KW - flexibel

KW - Wärmebehandlung

KW - Metastabil

KW - Wafer-Krümmungs-Methode

KW - Synchrotron

KW - Mo

KW - Ag

KW - Molybdenum

KW - Silver

KW - thin films

KW - immiscible

KW - sputtering

KW - flexible

KW - thermo-mechanical

KW - wafer curvature

KW - annealing

KW - X-Ray diffraction

KW - Synchrotron

KW - metastable phases

U2 - 10.34901/mul.pub.2023.271

DO - 10.34901/mul.pub.2023.271

M3 - Master's Thesis

ER -