Thermo-mechanical behaviour of Mo-Ag thin films
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Research output: Thesis › Master's Thesis
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TY - THES
T1 - Thermo-mechanical behaviour of Mo-Ag thin films
AU - Trost, Claus Othmar Wolfgang
N1 - embargoed until 18-09-2023
PY - 2018
Y1 - 2018
N2 - In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.
AB - In this work, the thermo-mechanical behaviour, the evolution of phases of thin films consisting of the immiscible system Molybdenum-Silver (Mo-Ag) were investigated. The 40 nm to 770 nm thick films were deposited via a dc magnetron sputtering process on rigid (Silicon) and flexible (Polyimide) substrates. The compositions ranged from 9 at.% to pure silver films, with a focus on the Mo-rich films. It was observed that differences in terms of composition and film thickness in the rigid system led to differences in thermo-mechanical behaviour. These differences were evaluated using different annealing treatments in a wafer curvature system and then they were used to interpret the behaviour of the flexible counterparts. Via X-Ray diffraction it was observed that phases ranged from metastable phases before annealing and after annealing to segregated Mo-rich and Ag-rich phases. The surface evolution was found to evolve with increasing silver content and with both time and temperature.
KW - Mo
KW - Ag
KW - Molybdän
KW - Silber
KW - dünne Filme
KW - flexibel
KW - Wärmebehandlung
KW - Metastabil
KW - Wafer-Krümmungs-Methode
KW - Synchrotron
KW - Mo
KW - Ag
KW - Molybdenum
KW - Silver
KW - thin films
KW - immiscible
KW - sputtering
KW - flexible
KW - thermo-mechanical
KW - wafer curvature
KW - annealing
KW - X-Ray diffraction
KW - Synchrotron
KW - metastable phases
U2 - 10.34901/mul.pub.2023.271
DO - 10.34901/mul.pub.2023.271
M3 - Master's Thesis
ER -