Thermal stability of MoNbTaTiW, MoNbTaVW and CrMoNbTaW thin films deposited by high power impulse magnetron sputtering

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Autoren

  • Alice Lassnig
  • Stanislav Žák
  • Christoph Gammer
  • Megan Cordill

Externe Organisationseinheiten

  • Erich-Schmid-Institut für Materialwissenschaft der Österreichischen Akademie der Wissenschaften

Abstract

With the envisioned use as high-temperature materials, the thermal stability of three high entropy alloy thin films, based on the system MoNbTaW with additional Cr, Ti or V, was studied. All films were deposited by high power impulse magnetron sputtering and subsequently annealed in vacuum up to a temperature of 1200 °C and analyzed by X-ray diffraction. The obtained body-centered cubic structure in the as-deposited state remained stable up to the maximum annealing temperature. Measurements of the residual stress by wafer curvature and sin 2Ψ method revealed a general reduction of the stress with annealing temperature due to defect annihilation.

Details

OriginalspracheEnglisch
Aufsatznummer129189
Seitenumfang7
FachzeitschriftSurface & coatings technology
Jahrgang454.2023
Ausgabenummer15 February
Frühes Online-Datum23 Dez. 2022
DOIs
StatusVeröffentlicht - 15 Feb. 2023