Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure. / Keckes, Jozef; Six, S.; Gerlach, J.W. et al.
in: Journal of crystal growth, Jahrgang 262, 2004, S. 119-123.
in: Journal of crystal growth, Jahrgang 262, 2004, S. 119-123.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Keckes, J, Six, S, Gerlach, JW & Rauschenbach, B 2004, 'Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure', Journal of crystal growth, Jg. 262, S. 119-123.
APA
Keckes, J., Six, S., Gerlach, J. W., & Rauschenbach, B. (2004). Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure. Journal of crystal growth, 262, 119-123.
Vancouver
Keckes J, Six S, Gerlach JW, Rauschenbach B. Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure. Journal of crystal growth. 2004;262:119-123.
Author
Bibtex - Download
@article{664d4c8d2ef447bfbb73630d797af876,
title = "Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure",
author = "Jozef Keckes and S. Six and J.W. Gerlach and B. Rauschenbach",
year = "2004",
language = "English",
volume = "262",
pages = "119--123",
journal = "Journal of crystal growth",
issn = "0022-0248",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure
AU - Keckes, Jozef
AU - Six, S.
AU - Gerlach, J.W.
AU - Rauschenbach, B.
PY - 2004
Y1 - 2004
M3 - Article
VL - 262
SP - 119
EP - 123
JO - Journal of crystal growth
JF - Journal of crystal growth
SN - 0022-0248
ER -
