Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

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Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. / Andreev, Andrei; Teichert, Christian.
2005. Postersitzung präsentiert bei 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, USA / Vereinigte Staaten.

Publikationen: KonferenzbeitragPosterForschung(peer-reviewed)

Harvard

Andreev, A & Teichert, C 2005, 'Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy', 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, USA / Vereinigte Staaten, 31/10/05 - 4/11/05.

APA

Andreev, A., & Teichert, C. (2005). Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. Postersitzung präsentiert bei 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, USA / Vereinigte Staaten.

Vancouver

Andreev A, Teichert C. Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. 2005. Postersitzung präsentiert bei 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, USA / Vereinigte Staaten.

Author

Andreev, Andrei ; Teichert, Christian. / Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy. Postersitzung präsentiert bei 52nd Annual International Symposium of the American Vacuum Society (AVS), Boston, Massachusetts, USA / Vereinigte Staaten.

Bibtex - Download

@conference{e9962f0170e846deb811226cbf26c6fe,
title = "Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy",
author = "Andrei Andreev and Christian Teichert",
year = "2005",
language = "English",
note = "52nd Annual International Symposium of the American Vacuum Society (AVS) ; Conference date: 31-10-2005 Through 04-11-2005",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Nano-scale characterization of high-k dielectric materials by conducting atomic force microscopy

AU - Andreev, Andrei

AU - Teichert, Christian

PY - 2005

Y1 - 2005

M3 - Poster

T2 - 52nd Annual International Symposium of the American Vacuum Society (AVS)

Y2 - 31 October 2005 through 4 November 2005

ER -