Microstructure related stress state in magnetron sputtered thin films
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Microstructure related stress state in magnetron sputtered thin films. / Daniel, Rostislav; Martinschitz, Klaus; Keckes, Jozef et al.
Proceedings E-MRS Spring Meeting. 2009. S. 25-25.
Proceedings E-MRS Spring Meeting. 2009. S. 25-25.
Publikationen: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Konferenzband
Harvard
Daniel, R, Martinschitz, K, Keckes, J & Mitterer, C 2009, Microstructure related stress state in magnetron sputtered thin films. in Proceedings E-MRS Spring Meeting. S. 25-25.
APA
Daniel, R., Martinschitz, K., Keckes, J., & Mitterer, C. (2009). Microstructure related stress state in magnetron sputtered thin films. In Proceedings E-MRS Spring Meeting (S. 25-25)
Vancouver
Daniel R, Martinschitz K, Keckes J, Mitterer C. Microstructure related stress state in magnetron sputtered thin films. in Proceedings E-MRS Spring Meeting. 2009. S. 25-25
Author
Bibtex - Download
@inproceedings{9d11423fa2bf43e4b459d280ed1bba93,
title = "Microstructure related stress state in magnetron sputtered thin films",
author = "Rostislav Daniel and Klaus Martinschitz and Jozef Keckes and Christian Mitterer",
year = "2009",
language = "English",
pages = "25--25",
booktitle = "Proceedings E-MRS Spring Meeting",
}
RIS (suitable for import to EndNote) - Download
TY - GEN
T1 - Microstructure related stress state in magnetron sputtered thin films
AU - Daniel, Rostislav
AU - Martinschitz, Klaus
AU - Keckes, Jozef
AU - Mitterer, Christian
PY - 2009
Y1 - 2009
M3 - Conference contribution
SP - 25
EP - 25
BT - Proceedings E-MRS Spring Meeting
ER -
