Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials

Publikationen: KonferenzbeitragVortragForschung(peer-reviewed)

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@conference{671328098e4c4387b1a4a0b1ba5b6ae5,
title = "Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials",
author = "Rostislav Daniel and Christian Mitterer and Jozef Keckes",
year = "2014",
language = "English",
note = "72nd IUVSTA Workshop ; Conference date: 06-04-2014",

}

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TY - CONF

T1 - Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials

AU - Daniel, Rostislav

AU - Mitterer, Christian

AU - Keckes, Jozef

PY - 2014

Y1 - 2014

M3 - Presentation

T2 - 72nd IUVSTA Workshop

Y2 - 6 April 2014

ER -