Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
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Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials. / Daniel, Rostislav; Mitterer, Christian; Keckes, Jozef.
2014. 72nd IUVSTA Workshop.
2014. 72nd IUVSTA Workshop.
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
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Daniel, R, Mitterer, C & Keckes, J 2014, 'Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials', 72nd IUVSTA Workshop, 6/04/14.
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Bibtex - Download
@conference{671328098e4c4387b1a4a0b1ba5b6ae5,
title = "Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials",
author = "Rostislav Daniel and Christian Mitterer and Jozef Keckes",
year = "2014",
language = "English",
note = "72nd IUVSTA Workshop ; Conference date: 06-04-2014",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials
AU - Daniel, Rostislav
AU - Mitterer, Christian
AU - Keckes, Jozef
PY - 2014
Y1 - 2014
M3 - Presentation
T2 - 72nd IUVSTA Workshop
Y2 - 6 April 2014
ER -