Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films. / Hofer-Roblyek, Anna Maria; Pichler, Karl-Heinz; Linke, Christian et al.
in: Surface & coatings technology, 2018, S. 354-359.
in: Surface & coatings technology, 2018, S. 354-359.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Hofer-Roblyek, AM, Pichler, K-H, Linke, C, Franz, R, Winkler, J & Mitterer, C 2018, 'Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films', Surface & coatings technology, S. 354-359. https://doi.org/10.1016/j.surfcoat.2018.07.095
APA
Hofer-Roblyek, A. M., Pichler, K.-H., Linke, C., Franz, R., Winkler, J., & Mitterer, C. (2018). Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films. Surface & coatings technology, 354-359. https://doi.org/10.1016/j.surfcoat.2018.07.095
Vancouver
Hofer-Roblyek AM, Pichler KH, Linke C, Franz R, Winkler J, Mitterer C. Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films. Surface & coatings technology. 2018;354-359. doi: 10.1016/j.surfcoat.2018.07.095
Author
Bibtex - Download
@article{6f7def7645f142548374cfa25c060f8e,
title = "Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films",
author = "Hofer-Roblyek, {Anna Maria} and Karl-Heinz Pichler and Christian Linke and Robert Franz and J{\"o}rg Winkler and Christian Mitterer",
year = "2018",
doi = "10.1016/j.surfcoat.2018.07.095",
language = "English",
pages = "354--359",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Linking erosion and sputter performance of a rotatable Mo target to microstructure and properties of the deposited thin films
AU - Hofer-Roblyek, Anna Maria
AU - Pichler, Karl-Heinz
AU - Linke, Christian
AU - Franz, Robert
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1016/j.surfcoat.2018.07.095
DO - 10.1016/j.surfcoat.2018.07.095
M3 - Article
SP - 354
EP - 359
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
