Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique. / Massl, S.; Thomma, W.; Keckes, Jozef et al.
in: Acta materialia, Jahrgang 57, 2009, S. 1768-1776.
in: Acta materialia, Jahrgang 57, 2009, S. 1768-1776.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Massl, S, Thomma, W, Keckes, J & Pippan, R 2009, 'Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique', Acta materialia, Jg. 57, S. 1768-1776.
APA
Massl, S., Thomma, W., Keckes, J., & Pippan, R. (2009). Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique. Acta materialia, 57, 1768-1776.
Vancouver
Massl S, Thomma W, Keckes J, Pippan R. Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique. Acta materialia. 2009;57:1768-1776.
Author
Bibtex - Download
@article{05f88ce377454da99083a355ab9d9bac,
title = "Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique",
author = "S. Massl and W. Thomma and Jozef Keckes and Reinhard Pippan",
year = "2009",
language = "English",
volume = "57",
pages = "1768--1776",
journal = "Acta materialia",
issn = "1359-6454",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
AU - Massl, S.
AU - Thomma, W.
AU - Keckes, Jozef
AU - Pippan, Reinhard
PY - 2009
Y1 - 2009
M3 - Article
VL - 57
SP - 1768
EP - 1776
JO - Acta materialia
JF - Acta materialia
SN - 1359-6454
ER -
