Influence of reactive gas flow ratio during sputter deposition of Mo-O-N thin films on their structure and properties
Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Masterarbeit
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Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Masterarbeit
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TY - THES
T1 - Influence of reactive gas flow ratio during sputter deposition of Mo-O-N thin films on their structure and properties
AU - Rath, Thaddäa
N1 - no embargo
PY - 2018
Y1 - 2018
N2 - Functional transition metal oxynitrides (Me-O-N) are emerging materials that are known for their tunable and often enhanced physical properties compared to conventional oxides. As, however, relatively little is known about the Mo-O-N system, this study illuminates the influence of N on the microstructure as well as the mechanical, optical and electrical properties. Mo-O-N films were grown by DC reactive magnetron sputter deposition at different reactive gas flow N2/(O2+N2) ratios. The films change with increasing fraction of N, from an amorphous, transparent and non-conductive with inferior mechanical properties to crystalline, metal-like conductive and hard. Additionally, the film thickness affects the optical and electrical properties.
AB - Functional transition metal oxynitrides (Me-O-N) are emerging materials that are known for their tunable and often enhanced physical properties compared to conventional oxides. As, however, relatively little is known about the Mo-O-N system, this study illuminates the influence of N on the microstructure as well as the mechanical, optical and electrical properties. Mo-O-N films were grown by DC reactive magnetron sputter deposition at different reactive gas flow N2/(O2+N2) ratios. The films change with increasing fraction of N, from an amorphous, transparent and non-conductive with inferior mechanical properties to crystalline, metal-like conductive and hard. Additionally, the film thickness affects the optical and electrical properties.
KW - Mo-O-N system
KW - thin films
KW - DC reactive magnetron sputtering
KW - microstructure
KW - mechanical properties
KW - optical properties
KW - electrical properties
KW - Mo-O-N System
KW - dünne Schichten
KW - DC Magnetron-Sputtern
KW - Mikrostruktur
KW - mechanische Eigenschaften
KW - optische Eigenschaften
KW - elektrische Eigenschaften
M3 - Master's Thesis
ER -
