Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
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in: Beilstein journal of nanotechnology , Jahrgang 3, 2012, S. 507-512.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
AU - Hlawacek, Gregor
AU - Veligura, Vasilisa
AU - Lorbek, Stefan
AU - Mocking, Tijs F.
AU - George, Antony
AU - van Gastel, Raoul
AU - Zandvliet, Harold J. W.
AU - Poelsema, Bene
PY - 2012
Y1 - 2012
U2 - 10.3762%2Fbjnano.3.58
DO - 10.3762%2Fbjnano.3.58
M3 - Article
VL - 3
SP - 507
EP - 512
JO - Beilstein journal of nanotechnology
JF - Beilstein journal of nanotechnology
SN - 2190-4286
ER -