GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”
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GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”. / Görgl, Richard; Dehm, Gerhard.
2006.
2006.
Publikationen: Buch/Bericht › Forschungsbericht › Transfer › (peer-reviewed)
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Bibtex - Download
@book{88ed4c31c47c417681b6049a4b74db30,
title = "GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”",
author = "Richard G{\"o}rgl and Gerhard Dehm",
year = "2006",
language = "Deutsch",
}
RIS (suitable for import to EndNote) - Download
TY - BOOK
T1 - GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”
AU - Görgl, Richard
AU - Dehm, Gerhard
PY - 2006
Y1 - 2006
M3 - Forschungsbericht
BT - GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”
ER -
